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In Situ Control during Growth of SiO2 Films on InP by ECR Plasma

Author(s):
Joseph, J.
Besland, M.P.
Callard, S.
Gagnaire, A.
Lambrinos, M.
Hollinger, G.
1 more
Publication title:
Proceedings of the tenth symposium on plasma processing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-20
Pub. Year:
1994
Page(from):
525
Page(to):
535
Pages:
11
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770774 [1566770777]
Language:
English
Call no.:
E23400/941901
Type:
Conference Proceedings

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