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Minimization of the Profile Microloading in Polysilicon Etching

Author(s):
Lum, R.
Tsai, P.
Furr, M.
Bucknall, R.E.
Wiltse, M.
Hills, G.W.
1 more
Publication title:
Proceedings of the tenth symposium on plasma processing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-20
Pub. date:
1994
Page(from):
254
Page(to):
263
Pages:
10
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770774 [1566770777]
Language:
English
Call no.:
E23400/941901
Type:
Conference Proceedings

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