Blank Cover Image

Very High Frequency (VHF) Capacitive Discharges in Plasma Processing

Author(s):
Publication title:
Proceedings of the tenth symposium on plasma processing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-20
Pub. Year:
1994
Page(from):
13
Page(to):
21
Pages:
9
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770774 [1566770777]
Language:
English
Call no.:
E23400/941901
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Plasma Processing of Polyester Webs in Capacitively Coupled Low-Radio-Frequency Discharges

J.M. Grace, L.J. Gerenser, H.K. Zhuang, D.R. Freeman, M.J. Heinsler

Society of Vacuum Coaters
7 Technical Paper Computational and experimental investigation of open-air plasma discharges

Nusca, M.J., White, K.J., Young, T.R., Lind, C.A.

American Institute of Aeronautics and Astronautics
2 Conference Proceedings Process Model for Process Control in Semiconductor Processing

Meyyappan, M., de Jong, F., Govindan, T.R., Buggeln, R.

Electrochemical Society
8 Technical Paper Computational and Experimental Investigations of Open-Air Plasma Discharges

Nusca, M.J., White, K.J., Williams, A.W., Landsberg, A.M., Young, T.R., Lind, C.A.

American Institute of Aeronautics and Astronautics
3 Conference Proceedings Piezoceramics for high-frequency(50 to 100 MHz)single-element imaging transducers

Zipparo,M.J., Shung,K.K., Shrout,T.R.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Micromachined capacitive switches at microwave frequencies

Wong,C.H., Tan,M.J., Guo,L.H., Huang,J.-M., Liew,K.M., Liu,A.Q.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Plasma Modeling as a Design Tool in Microelectronics Manufacturing

Meyyappan, M., Bose, D., Hash, D., Hwang, H., Govindan, T.R.

Electrochemical Society
10 Conference Proceedings ANALYSIS OF VHF GLOW DISCHARGE OF a-Si:H OVER A WIDE FREQUENCY RANGE

Zedlitz, R., Heintze, M., Bauer, G.H.

Materials Research Society
5 Conference Proceedings RF DISCHARGE MODELING THROUGH SOLUTIONS TO THE MOMENTS OF THE BOLTZMANN TRANSPORT EQUATIONS

Meyyappan, M., Govindan, T. R., Kreskovsky, J. P.

Materials Research Society
11 Conference Proceedings VHF Large Area Plasma Processing on Moving Substrates

Kuske, J., Stephan, U., Terasa, R., Brechtel, H., Kottwitz, A.

Materials Research Society
6 Conference Proceedings Neural network modeling of growth processes

Venkateswaran,S., Rai,M.M., Govindan,T.R., Meyyappan,M.

SPIE - The International Society for Optical Engineering
12 Conference Proceedings Analysis of Plasma Properties and Deposition of Amorphous Silicon Alloy Solar Cells Using Very High Frequency Glow Discharge

Gallagher, A., Guha, S., Yan, B., Yang, J.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12