High Resolution Dry Etching of III-V Semiconductor Materials using Magnetically Enhanced Discharges

High Resolution Dry Etching of III-V Semiconductor Materials using Magnetically Enhanced Discharges

Author(s):: Pearton, S. J.
Publication title:: Proceedings of the Symposium on Large Area Wafer Growth and Processing for Electronic and Photonic Devices and the twentieth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XX)
Title of ser.:: Electrochemical Society Proceedings Series
Ser. no.:: 1994-18
Pub. Year:: 1994
Page(from):: 73
Page(to):: 86
Pages:: 14
Pub. info.:: Pennington, NJ: Electrochemical Society
ISSN:: 01616374
ISBN:: 9781566770750 [1566770750]
Language:: English
Call no.:: E23400/950354
Type:: Conference Proceedings

Details

TDL ID:	ZA00014127
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Large Area Wafer Growth and Processing for Electronic and Photonic Devices ; State-of-the-Art Program on Compound Semiconductors - SOTAPOCS ; Meeting of the Electrochemical Society
Conf. info. (Number):	1994 ; 20th ; 185th
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1994.05.22-1994.05.27

Similar Items:

1 Conference Proceedings DRY ETCHING TECHNIQUES AND CHEMISTRIES FOR III-V SEMICONDUCTORS Pearton, S.J. Materials Research Society	7 Conference Proceedings WET AND DRY ETCHING OF InGaP Lothian, J. R., Kuo, J. M., Pearton, S. J., Ren, F. Materials Research Society
2 Conference Proceedings COMPARISON OF MULTIPOLAR RESONANT-CAVITY AND MAGNETIC MIRROR MICROWAVE ECR SOURCES FOR DRY ETCHING OF III-V SEMICONDUCTORS Pearton, S. J., Abernathy, C. R., Ren, F. MRS - Materials Research Society	8 Conference Proceedings Dry Etching of III-V Nitrides Pearton, S. J., Shul, R. J., McLane, G. F., Constantine, C. MRS - Materials Research Society
3 Conference Proceedings Ion-enhanced dry etching of magnetic multilayers: Post-etch cleaning and effects of UV illumination Cho, H., Lee, K. P., Jung, K. B., Sharifi, F., Marburger, J., Pearton, S. J. MRS-Materials Research Society	9 Conference Proceedings High density dry-etching of (Ba,Sr) TiO3 and LaNiO3 Lee, K. P., Jung, K. B., Srivastava, A., Kumar, D., Singh, R. K., Pearton, S. J. MRS-Materials Research Society
4 Conference Proceedings HIGH DENSITY MAGNETICALLY CONFINED DRY ETCHING OF METALLIZATION AND DIELECTRICS IN GaAs DEVICE TECHNOLOGY Pearton, S. J., Abernathy, C. R., Ren, F., Lothian, J. R., Kopf, R. P., Katz, A. MRS - Materials Research Society	10 Conference Proceedings Dry Etching of MRAM Structures Pearton, S.J., Cho, H., Jung, K.B., Childress, J.R., Sharifi, F., Marburger, J. Materials Research Society
5 Conference Proceedings Low Bias Dry Etching of SiC and SiCN in ICP NF3 Discharges Wang, J. J., Cho, Hyun, Lambers, E. S., Pearton, S. J., Ostling, M., Zetterling, C-M., Grow, J. M., Ren, F., Shul, R. … MRS - Materials Research Society	11 Conference Proceedings PLASMA ETCHING OF InP AND RELATED MATERIALS IN ELECTRON CYCLOTRON RESONANCE CH4/H2/Ar DISCHARGES Pearton, S. J., Chakrabarti, U. K., Kinsell, A. P., Emerson, A. B., Johnson., D., Constantine, C. Materials Research Society
6 Conference Proceedings Dry-etching processes for fabrication of QWIPs and other detector structures Pearton,S.J. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Wet Chemcial Etching of Compound Semiconductors Pearton, S., Ren, F. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12