High Resolution Dry Etching of III-V Semiconductor Materials using Magnetically Enhanced Discharges
- Author(s):
- Pearton, S. J.
- Publication title:
- Proceedings of the Symposium on Large Area Wafer Growth and Processing for Electronic and Photonic Devices and the twentieth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XX)
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 1994-18
- Pub. Year:
- 1994
- Page(from):
- 73
- Page(to):
- 86
- Pages:
- 14
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770750 [1566770750]
- Language:
- English
- Call no.:
- E23400/950354
- Type:
- Conference Proceedings
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