Effect Of Plasma Damage On TI Silicidation Along Salicide Process

Effect Of Plasma Damage On TI Silicidation Along Salicide Process

Author(s):

Publication title:

Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

1994-16

Pub. Year:

1994

Page(from):

593

Page(to):

602

Pages:

10

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566770484 [1566770483]

Language:

English

Call no.:

E23400/942240

Type:

Conference Proceedings

Details

TDL ID:	ZA00014125
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
Conf. info. (Number):	3rd
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1994.05.23-1994.05.27

Similar Items:

1 Conference Proceedings Effect of Oxygen on the Formation of Dryetching Damage Introduced Into Si-Substrate Hamada, K., Kitano, T. MRS - Materials Research Society	7 Conference Proceedings Degradation of PMOS series resistance due to Si implantation for Ti-salicide process Lim,E.H., Siah,S.-Y., Lim,C.W., Lee,Y.M., Zheng,J.Z., Sundaresan,R., Pey,K.L. SPIE - The International Society for Optical Engineering
2 Conference Proceedings Effect of Antiphase Domain Boundaries on Prism Slip in Ti3Al Single Crystals Koizumi, Y., Minamino, Y., Tsuji, N., Nakano, T., Umakoshi, Y. Materials Research Society	8 Conference Proceedings EFFECTS OF CONCURRENT Co OR Ti SILICIDATION ON TRANSIENT DIFFUSION AND END-OF-RANGE DAMAGE IN PHOSPHORUS IMPLANTED SILICON Honeycutt, J. W., Ravi, J., Rozgonyi, G. A. Materials Research Society
3 Conference Proceedings A Simple Co Salicide Process Using Silicidation by N2/H2 RTA Sekiguchi, Mitsuru, Moriwaki, Masaru, Fujii, Shinji, Mayumi, Shuichi MRS - Materials Research Society	9 Conference Proceedings Influence of Precipitates on Behavior of Recrystallization and Grain Growth in Extra Low Carbon Ti-Bearing Cold-Rolled Steel Sheets Suzuki,T., Ishii,Y., Itami,A., Ushioda,K., Yoshinaga,N., Tezuka,M. Trans Tech Publications
4 Conference Proceedings Usability of Ti6Al4V Powder via Hydride-Dehydride Process for Selective Laser Melting Process N. Sato, M. Ito, T. Izumida, T. Shimizu, S. Nakano Trans Tech Publications	10 Conference Proceedings 13C NMR structural study on cellulose derivatives with carbonyl groups as a sensitive probe Tezuka, Y. American Chemical Society
5 Conference Proceedings Usability of Ti6Al4V Powder via Hydride-Dehydride Process for Selective Laser Melting Process N. Sato, M. Ito, T. Izumida, T. Shimizu, S. Nakano Trans Tech Publications	11 Conference Proceedings Silicidation by Rapid Thermal Processing Van den Hove L., De Keersmaecker F. R. Plenum Press
6 Conference Proceedings Al2O3 Passivation Film on Austenitic Stainless Steel Free from Plasma Damage Kitano, M., Nagase, M., Shirai, Y., Ohmi, T. Electrochemical Society	12 Conference Proceedings Study of Snap-Back Characteristics in a 1.2 Micron Salicide Process Shukla,D.K., Singh,D.N., Datta,Devesh SPIE-The International Society for Optical Engineering, Narosa

1

2

3

4

5

6

7

8

9

10

11

12