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In-Situ H2 Pretreatment An Thermal Nitridation For Ultrathin Silicon Nitride Capacitors

Author(s):
Kuramae, M.
Hataishi, O.
Mieno, P.
Nakamura, M.
Suzuki, Y.
Nomura, H.
Shimizu, A.
Furumura, Y.
3 more
Publication title:
Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-16
Pub. Year:
1994
Page(from):
450
Page(to):
457
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770484 [1566770483]
Language:
English
Call no.:
E23400/942240
Type:
Conference Proceedings

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