Compositionally Inhomogenous Silicon Oxynitride Dielectrics
- Author(s):
Wager, J.F. Lim, S. Ryu, J.H. Marlia, J. Remley, K. Lite, K. Plant, T.K. Weisshaar, A. Casas, L.M. - Publication title:
- Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 1994-16
- Pub. Year:
- 1994
- Page(from):
- 187
- Page(to):
- 197
- Pages:
- 11
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770484 [1566770483]
- Language:
- English
- Call no.:
- E23400/942240
- Type:
- Conference Proceedings
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