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Compositionally Inhomogenous Silicon Oxynitride Dielectrics

Author(s):
Wager, J.F.
Lim, S.
Ryu, J.H.
Marlia, J.
Remley, K.
Lite, K.
Plant, T.K.
Weisshaar, A.
Casas, L.M.
4 more
Publication title:
Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-16
Pub. date:
1994
Page(from):
187
Page(to):
197
Pages:
11
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770484 [1566770483]
Language:
English
Call no.:
E23400/942240
Type:
Conference Proceedings

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