Tips for Scanning Probe Microscopy Produced with LIGA
- Author(s):
Akkaraju, S. Kelly, K. Li, B. Ma, E. Meletis, E.I. Murphy, M. Palshin, V. Wang, W. Madou, M. - Publication title:
- Proceedings of the Symposium on Microstructures and Microfabricated Systems
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 1994-14
- Pub. Year:
- 1994
- Page(from):
- 188
- Page(to):
- 195
- Pages:
- 8
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770460 [1566770467]
- Language:
- English
- Call no.:
- E23400/941398
- Type:
- Conference Proceedings
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