Fabrication of Microstructures for Use in Biological and Optical Applications
- Author(s):
Denton, D.D. Theil, A.J. Smith, L.M. Bajikar, S. White, V. Ghodssi, R. Fish, G. McCaughan, L. - Publication title:
- Proceedings of the Symposium on Microstructures and Microfabricated Systems
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 1994-14
- Pub. Year:
- 1994
- Page(from):
- 103
- Page(to):
- 114
- Pages:
- 12
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770460 [1566770467]
- Language:
- English
- Call no.:
- E23400/941398
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
An Optimized LIGA/MEMS Process for Polymer Waveguides on a Linear Microactuator
Electrochemical Society |
7
Conference Proceedings
Hardening and Microstructure of Model Reactor Pressure Vessel Steel Alloys Using Proton Irradiation
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
North-Holland |
5
Conference Proceedings
A Comparative Study of the Reflectance Difference Spectrum from Si(001) Using Reflectance Difference Spectroscopy/Low-Energy Electron Diffraction/Scanning …
MRS - Materials Research Society |
11
Conference Proceedings
Data communication in mid-IR using a solid state lase-pumped optical parametric oscillator
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
ENVIROMENTAL AND BIOLOGICAL ASPECTS OF SLOPE DWELLING FISHED OF THE NORTH ATLANTIC SLOPE
Kluwer Academic Publishers |
12
Conference Proceedings
SU 8 used as optical waveguide In Integrated optical microsensor for biological applications [5972-35]
SPIE - The International Society of Optical Engineering |