Blank Cover Image

Implications of thin buried-oxide for SIMOX circuit performance

Author(s):
Publication title:
Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-11
Pub. date:
1994
Page(from):
459
Page(to):
464
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770439 [1566770432]
Language:
English
Call no.:
E23400/941388
Type:
Conference Proceedings

Similar Items:

Allen, L P, Anc, M J, Duffy, M, Parechanian, J H, Yap, J H

Electrochemical Society

Seo, J-H, Woo, J C, Mendicino, M, Vasudev, P K

Electrochemical Society

2 Conference Proceedings Investigation of extreme anneal in SIMOX

Ane, M J, Krull, W A, Ryding, G

Electrochemical Society

Anc, MJ., Krull, W.A., Alles, M.A.

Electrochemical Society

Tenbroek, B.M., Whiting, G., Lee, M.S.L., Edwards, C.F., Redman-White, W.

Electrochemical Society

Troccoli, M., Afentakis, T., Chuang, T.H., Chang, Y.L., Hatalis, M., Voutsas, A.P., Hartzell, J.W., Chouvardas, V.

Electrochemical Society

Aspar, B., Pudda, C., Papon, A.M., Auberton-Herve, A.J., Lamure, J.M.

Electrochemical Society

Zimmerman, L., Rivera, A., Nijs, J. M. M. De, Veen, A. Van

MRS - Materials Research Society

Hwang, J. M., Bartko, J., Rai-Choudhury, P., Bailey, W. E.

Materials Research Society

Lisovskii, I P, Revesz, A G, Hughes, H L

Electrochemical Society

Karulkar, Pramod C., Wyatt, P.W.

Materials Research Society

Shimura, T., Hosoi, T., Umeno, M.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12