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Properties of SOI MOSFET's obtained on multilayer buried dielectrics

Author(s):
Lysenko, V.S.
Nazarov, A.N.
Rudenko, T.E.
Rudenko, A.N.
Kilchitskaya, V.I.
Givargizov, E.I.
Limanov, A.B.
2 more
Publication title:
Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-11
Pub. Year:
1994
Page(from):
324
Page(to):
332
Pages:
9
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770439 [1566770432]
Language:
English
Call no.:
E23400/941388
Type:
Conference Proceedings

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