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Effect of nitrogen ambients during high temperature SIMOX annealing

Author(s):
Roitman, P.
Mayo, S.
Simons, D.
Krause, S.J.
Venables, D.
Park, J.C.
Lee, J.D.
Lenahan, P.
Conley, J.
4 more
Publication title:
Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-11
Pub. date:
1994
Page(from):
92
Page(to):
97
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770439 [1566770432]
Language:
English
Call no.:
E23400/941388
Type:
Conference Proceedings

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