Blank Cover Image

Delineation of crystallographic defects in ultra thin SIMOX materials produced by low energy low dose oxygen implantation

Author(s):
Giles, L.F.
Meyyappan, N.
Nejim, A.
Blake, J.
Cristiano, F.
Hemment, P.L.F.
1 more
Publication title:
Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-11
Pub. Year:
1994
Page(from):
50
Page(to):
56
Pages:
7
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770439 [1566770432]
Language:
English
Call no.:
E23400/941388
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Nucleation of oxidation induced stacking faults (01SF) in ion implanted SIMOX structures

Giles, L.F., Nejim, A., Cristiano, F., Hemment, P.L.F.

Electrochemical Society
7 Conference Proceedings Refractive index and compositional depth profiles in high energy SiMOX structures

Hatzopoulos, N., Siapkas, D.I., Katsidis, C.C., Zorba, T., Hemment, P.L.F.

Electrochemical Society
2 Conference Proceedings Preparation and Characterization of Thin Film Simox Materials

Nejim A., Hemment F. L. P.

Kluwer Academic Publishers
8 Conference Proceedings LOW-DEFECT, HIGH-QUALITY SIMOX PRODUCED BY MULTIPLE OXYGEN IMPLANTATION WITH SUBSTOICHIOMETRIC TOTAL DOSE

Namavar, F., Cortesi, E., Sioshansi, P.

Materials Research Society
3 Conference Proceedings Formation and characterization of double SIMOX structures by sequential high and low energy oxygen implantation into silicon

Hatzopoulos, N., Siapkas, D.I., Hemment, P.L.F., Skorupa, W.

Electrochemical Society
9 Conference Proceedings IMPROVED SOI FILMS BY HIGH DOSE OXYGEN IMPLANTATION AND LAMP ANNEALING

Celler, G.K., Hemment, P.L.F., West, K.W., Gibson, J.M.

Materials Research Society
4 Conference Proceedings Photoluminescence of Extended Defects in Silicon-on-Insulator Formed by Implantation of Oxygen

Qian, Y. H., Evans, J. H., Giles, L. F., Nejim, A., Hemment, P. L. F.

MRS - Materials Research Society
10 Conference Proceedings * SILICON ON INSULATOR FORMED BY 0+ OR N+ ION IMPLANTATION

Hemment, P.L.F.

Materials Research Society
5 Conference Proceedings DOSE DEPENCE OF DEFECTS IN SILICON PRODUCED BY HIGH DOSE,HIGH TEMPERATURE 0+ IMPLANTATION.

HOBBS,A., BARKLIE,R.C., REESON,K., HEMMENT,P.L.F.

Trans Tech Publications
11 Conference Proceedings Structural characterization by RBS and TEM of SiC buried layers formed by ion beam synthesis at high temperature

Nejim, A., Hemment, P.L.F., Stoemenos, J.

Electrochemical Society
6 Conference Proceedings Low Energy Oxygen Implantation for Dose Reduction in SIMOX (Invited)

Anc, M J, Cordss, B F, Blake, J G, Nakai, T

Electrochemical Society
12 Conference Proceedings Gettering of Cu to voids induced by H+ implantation in SIMOX substrate

Zhang, M., Lin, C., Hemment, P.L.F., Gutjahr, K., Goesele, U.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12