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Delineation of crystallographic defects in ultra thin SIMOX materials produced by low energy low dose oxygen implantation

Author(s):
Giles, L.F.
Meyyappan, N.
Nejim, A.
Blake, J.
Cristiano, F.
Hemment, P.L.F.
1 more
Publication title:
Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-11
Pub. date:
1994
Page(from):
50
Page(to):
56
Pages:
7
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770439 [1566770432]
Language:
English
Call no.:
E23400/941388
Type:
Conference Proceedings

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