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Synthesis of a buried oxide in related Si0.5Ge0.5 material using high energy oxygen implantation

Author(s):
Zhang, J.P.
Hemment, P.L.F.
Newstead, S.M.
Powell, A.R.
Whall, T.E.
Parker, E.H.C.
1 more
Publication title:
Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-11
Pub. Year:
1994
Page(from):
44
Page(to):
49
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770439 [1566770432]
Language:
English
Call no.:
E23400/941388
Type:
Conference Proceedings

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