Thirty years of silicon-on-insulators: do trends emerge?

Thirty years of silicon-on-insulators: do trends emerge?

Author(s):

Publication title:

Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

1994-11

Pub. Year:

1994

Page(from):

5

Page(to):

15

Pages:

11

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566770439 [1566770432]

Language:

English

Call no.:

E23400/941388

Type:

Conference Proceedings

Details

TDL ID:	ZA00014120
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Silicon-on-Insulator Technology and Devices ; Electrochemical Society Meeting
Conf. info. (Number):	6th ; 185th
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1994.05.22-1994.05.27

Similar Items:

1 Conference Proceedings Recent Advances in Fully-Scanned Active Matrix Displays Using Silicon-on-Insulator Technology Dolny, G., Ipri, A.C., Hsueh, F-L., Stewart, R.G., Atherton, J., Cuomo, F., Jose, D., Spitzer, M., Batty, D-P. VuM., … Electrochemical Society	7 Conference Proceedings Characterization of integrated Bragg gratings on silicon-on-insulator rib waveguides Chan, S.P., Passaro, V.M.N., Lim, S.T., Png, C.E., Headley, W., Masanovic, G., Reed, Graham T., Atta, R.M.H., Ensell, … SPIE - The International Society of Optical Engineering
2 Conference Proceedings Silicon-on-insulator resonant cavity photodiode without a slow carrier diffusion tail Sinnis,V.S., Seto,M., t'Hooft,G.W., Watabe,Y., Morrison,A.P., Hoekstra,W., Boer,W.B.de SPIE - The International Society for Optical Engineering	8 Conference Proceedings Relaxed SiGe On Insulator Fabricated via Wafer Bonding and Layer Transfer: Etch-back and Smart-cut Alternatives Taraschi, G., Cheng, Z.-Y., Currie, M.T., Leitz, C.W., Langdo, T.A., Lee, M.L., Pitera, A., Fitzgerald, E.A., … Electrochemical Society
3 Conference Proceedings 3-D Silicon-on-Insulator (SQl) Technologies Using Epitaxial Lateral Overgrowth (ELO) (Invited) Neudeck, G.W. Electrochemical Society	9 Conference Proceedings Polarization-independent optical ring resonators on silicon-on-insulator Headley, W.R., Reed, G.T., Liu, A., Paniccia, M.J., Howe, S. SPIE - The International Society of Optical Engineering
4 Conference Proceedings Grating couplers using silicon-on-insulator Ang,T.W., Reed,G.T., Vonsovici,A., Evans,A.G.R., Routley,P.R., Blackburn,T., Josey,M.R. SPIE - The International Society for Optical Engineering	10 Conference Proceedings Fabrication of optical ring resonators in silicon on insulator Headley, W.R., Reed, G.T., Liu, A., Cohen, O., Hak, D., Paniccia, M.J., Howe, S., Huille, I. SPIE - The International Society of Optical Engineering
5 Conference Proceedings Development of small silicon modulators in silicon-on-insulator (SOI) Png, C.E., Reed, G.T., Atta, R.M.H., Ensell, G., Evans, A.G.R. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Benchmarking of advanced CD-SEMs against a new unified specification for sub-0.18-μm lithography Deleporte,A.G., Allgair,J., Archie,C.N., Banke,G.W., Postek,M.T., Schlesinger,J.E., Vladar,A.E., Yanof,A.W. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Applications of color machine vision in the agricultural and food industries Zhang,M., Ludas,L.I., Morgan,M.T., Krutz,G.W., Precetti,C.J. SPIE - The International Society for Optical Engineering	12 Conference Proceedings Benchmarking of advanced CD-SEMs against the new unified specification for sub-0.18-ｦﾌm lithography Deleporte,A.G., Allgair,J., Archie,C.N., Banke,G.W., Postek,M.T., Schlesinger,J.E., Vladar,A.E., Yanof,A.W. SPIE - The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12