Blank Cover Image

ULTRASOUND TREATMENT OF CZ-Si WITH 'RING DEFECTS'

Author(s):
Publication title:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-10
Pub. Year:
1994
Page(from):
856
Page(to):
867
Pages:
12
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770422 [1566770424]
Language:
English
Call no.:
E23400/941387
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Mechanism of ultrasonic enhanced hydrogenation in poly-Si thin films using ultrasound treatment

Ostapenko,S.

Trans Tech Publications
7 Conference Proceedings *DEFECT CONTROL IN Cz SILICON

Kirscht, F. G., Kim,. S. B., Yeh, J. J., Wildes, P. D., Zaumseil, P.

Materials Research Society
2 Conference Proceedings Enhanced Hydrogenation Due to Ultrasound Treatment in Polycrystalline Silicon: New Approach to Thin Film Defect Engineering

Ostapenko, S., Henley, W., Karimpanakkel, S., Jastrzebski, L., Lagowski, J.

MRS - Materials Research Society
8 Conference Proceedings Enhanced Hydrogenation of Interface Bulk and Surface Traps in Polycrystalline Silicon Thin Films Subjected to Ultrasound Treatment

Ostapenko, S., Karimpanakkel, S., Jastrzebski, L., Lagowski, J.

Electrochemical Society
3 Conference Proceedings Resonance Ultrasonic Diagnostics of As-Grown and Process-Induced Defects in Cz Silicon

Belyaev, A., Tarasov, I., Ostapenko, S., Koveshnikov, S., Kochelap, V.A., Beyaev, A.E.

Electrochemical Society
9 Conference Proceedings HEAT-TREATMENT INDUCED DEFECTS IN CZ-SILICON

Dannefaer, S., Bretagnon, T., Abdurahman, K., Kerr, D., Hahn, S.

Materials Research Society
4 Conference Proceedings Resonance Ultrasonic Diagnostics of As-Grown and Process-Induced Defects in Cz Silicon

Belyaev,A., Tarasov,I., Ostapenko,S., Koveshnikov,S., Kochelap,V.A., Beyaev,A.E.

Electrochemical Society, SPIE-The International Society for Optical Engineering
10 Conference Proceedings Ultrasound Defect Engineering of Transition Metals Via Metal-Acceptor Pairs in Silicon

Bell, Ronald E., II., Ostapenko, Serguei, Lagowski, Jacek

MRS - Materials Research Society
5 Conference Proceedings Enhanced hydrogenation in polycrystalline Si thin films using ultrasound treatment

Ostapenko,S., Koshka,Y., Jastrzebski,L., Smeltzer,R.K.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings MORPHOLOGY CHANGE OF OXIDE PRECIPITATES IN CZ SILICON DURING TWO-STEP ANNEALING

Sueoka, K., Ikeda, N., Yamamoto, T., Kobayashi, S.

Electrochemical Society
6 Conference Proceedings Improvement of Polysilicon Thin Films and Thin-Film Transistors Using Ultrasound Treatment

Ostapenko, S., Jastrzebski, L., Lagowski, J., Smeltzer, R. K.

MRS - Materials Research Society
12 Conference Proceedings Transfer mechanism of defects on topcoat to resist pattern in immersion lithography process and effects on etching process

N. Takahashi, S. Shimura, T. Kawasaki

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12