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SIMULATION OF BURIED LAYER EXPERIMENTS CONTAIN- ING ALL FOUR DOPANT SPECIES

Author(s):
Ghaderi, K.
Hobler, G.
Budil, M.
Poetzl, H.
Pichler, P.
Ryssel, H.
Hansch, W.
Eisele, I.
Tian, C.
Stingeder, G.
5 more
Publication title:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-10
Pub. Year:
1994
Page(from):
613
Page(to):
624
Pages:
12
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770422 [1566770424]
Language:
English
Call no.:
E23400/941387
Type:
Conference Proceedings

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