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DOUBLE LAYERED CZ (DLCZ) SILICON CRYSTAL GROWTH

Author(s):
Kobayashi, S.
Fujiwara, H.
Fujiwara, T.
Kubo, T.
Inami, S.
Okui, M.
Miyahara, S.
Akashi, Y.
Kuramochi, K.
Tsujimoto, Y.
Okamoto, S.
6 more
Publication title:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-10
Pub. date:
1994
Page(from):
58
Page(to):
69
Pages:
12
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770422 [1566770424]
Language:
English
Call no.:
E23400/941387
Type:
Conference Proceedings

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