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*FACTORS AFFECTING CHARGING DAMAGE DURING PLASMA ETCHING

Author(s):
McVittie, J.P.  
Publication title:
Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-9
Pub. Year:
1994
Page(from):
59
Page(to):
70
Pages:
12
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770415 [1566770416]
Language:
English
Call no.:
E23400/941386
Type:
Conference Proceedings

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