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COMPARISON OF VAPOR-PHASE AND WET CHEMICAL PRE-GATE OXIDE AND PRE-CONTACT CLEANS

Author(s):
Draper, C.W.
Anyanwu, V.E.
Eisenberg, J.H.
Felton, G.J.
Roy, P.K.
Chittipeddi, S.
Bechtold, P.F.
Hagner, G.
Cooper, D.
Syverson, D.
Witowski, B.
Van Eck, B.
Gordon, M.
8 more
Publication title:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-7
Pub. Year:
1994
Page(from):
392
Page(to):
400
Pages:
9
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770385 [1566770386]
Language:
English
Call no.:
E23400/941397
Type:
Conference Proceedings

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