Blank Cover Image

A HF VAPOUR ETCH PROCESS FOR INTEGRATION IN CLUSTER-TOOL PROCESSES: CHARACTERISTICS AND APPLICATIONS

Author(s):
Vermeulen, W.J.C.
Kwakman, L.F.Tz.
Werkhoven, C.J.
Granneman, E.H.A.
Verhaverbeke, S.
Heyns, M.
1 more
Publication title:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1994-7
Pub. Year:
1994
Page(from):
241
Page(to):
252
Pages:
12
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770385 [1566770386]
Language:
English
Call no.:
E23400/941397
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings CLUSTER-TOOL INTEGRATED HF VAPOR ETCHING FOR NATIVE OXIDE FREE PROCESSING

Werkhoven, Chris, Granneman, Ernst, Kwakman, Loek, Hendriks, Menso, Verhaverbeke, Steven, Heyns, Marc, Bender, Hugo

MRS - Materials Research Society
7 Conference Proceedings CLEANING PROCEDURES FOR UHV CLUSTER-TOOL MOS FABRICATION

Sofield, C.J., Murrell, M.P., Sugden, S., Heyns, M., Verhaverbecke, S., Welland, M.E., Golan, B., Barnes, J.

Materials Research Society
2 Conference Proceedings HF-LAST CLEANINGS: A STUDY OF THE PROPERTIES WITH RESPECT TO THE DIFFERENT VARIABLES

Verhaverbeke, S., Bender, H., Meuris, M., Mertens, P. W., Schmidt, H. F., Heyns, M. M.

MRS - Materials Research Society
8 Conference Proceedings Improved Scalability of High-K Gate Dielectrics by using Hf-Aluminates

T. H. Hou, J. Gutt, C. Lim, S. Marcus, C. Pomarede, E. Shera, H. de Warrd, C. Werkhoven, M. Gardner, R. W. Murto, H. R. …

Electrochemical Society
3 Conference Proceedings SURFACE CHARACTERISATION OF Si AFTER HF TREATMENTS AND ITS INFLUENCE ON THE DIELECTRIC BREAKDOWN OF THERMAL OXIDES

Verhaverbeke, S., Alay, J., Mertens, P., Meuris, M., Heyns, M., Vandervorst, W., Murrell, M., Sofield, C.

Materials Research Society
9 Conference Proceedings OZONATED HF APPLICATIONS IN A SPRAY PROCESSING

Claes, M., Rohr, E., De Gendt, S., Lagrange, S., Bergman, E., Heyns, M.

Electrochemical Society
4 Conference Proceedings MODELLING OF THE HYDROGEN PASSIVATION KINETICS OF Si IN DILUTE HF SOLUTIONS

Verhaverbeke, S., Meuris, M., Schmidt, H., Mertens, P., Heyns, M.

Electrochemical Society
10 Conference Proceedings SILICON SURFACE ROUGHENING BY THE DECOMPOSITION OF HYDROGEN PEROXIDE

Mertens, P.W., Verhaverbeke, S., Heyns, M.M., Hellemans, L., Snauwaert, J., Dillenbeck, K.

Electrochemical Society
5 Conference Proceedings HYDROGEN PASSIVATION OF HF-LAST CLEANED (100) SILICON SURFACES: A MIR-FTIR STUDY

Bender, H., Verhaverbeke, S., Heyns, M.M.

Electrochemical Society
11 Conference Proceedings INTEGRATION OF HIGH-k GATE DIELECTRICS - WET ETCH CLEANING AND SURFACE CONDITIONING

De Gendt, S., Beckx, S., Caymax, M., Claes, M., Conard, T., Delabie, A., Deweerd, W., Hellin, D., Kraus, H., Onsia, B., …

Electrochemical Society
6 Conference Proceedings Influence of pre and post process conditions on the composition of thin Si3N4 thin films (3 nm) studied by XPS and TOFSIMS

Conard, T., Witte, H. De, Vandervorst, W., Houssa, M., Heyns, M., Pomarede, C., Werkhoven, C.

MRS-Materials Research Society
12 Conference Proceedings In-line TEM sample preparation and wafer return strategy for rapid yield learning [6152-81]

Bicais-Lepinay, N., Andre, F., Brevers, S., Guyader, P., Trouiller, C., Kwakman, L. F. Tz., Pokrant, S., Verkleij, D., …

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12