Detection and Sources of Volatile Clean Room Contaminants

Detection and Sources of Volatile Clean Room Contaminants

Author(s):

Muller, A.J.

Publication title:

Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

1994-3

Pub. Year:

1994

Page(from):

143

Page(to):

156

Pages:

14

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566770651 [1566770653]

Language:

English

Call no.:

E23400/941395

Type:

Conference Proceedings

Details

TDL ID:	ZA00014113
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing ; Electrochemical Spring Meeting
Conf. info. (Number):	2nd ; 1993
Conf. info. (Venue):	Honolulu, Hawaii, USA
Conf. info. (Date):	1993.05.16-1993.05.22

Similar Items:

1 Conference Proceedings DEGRADATION OF MATERIALS BY EMITTANTS FROM BURNING KUWAITI OIL Graedel, T.E., Comizzoli, R.B., Franey, J.P., Kammlott, G.W., Miller, A.E., Muller, A.J., Peins, G.A., Psota-Kelty, … Electrochemical Society	7 Conference Proceedings A Mechanistic Study of the Effect of Environmental Conditions in China, South-East Asia and Australia on the Corrosion of Zinc and Steel Cole, I.S., Ganther, W.D., Furman, S.A., Neufeld, A.K., Lau, D., Sinclair, J.D., Jankoski, C.A, Peins, G.A., … Electrochemical Society
2 Conference Proceedings OXIDATIVE STABILITY OF TERPENES, ALTERNATIVES TO CHLOROFLUOROCARBONS FOR CLEANING ELECTRONICS Muller, A.J., Opila, R.L., Krautter, H.W., Chandross, E.A. Electrochemical Society	8 Conference Proceedings Monitoring of Mobile Sodium Ions in SiO2 Using Corona Charging Stevie, F.A., Persson, E., DeBusk, D.K., Savchuk, A., Hoff, A.M., Edelman, P., Lagowski, J. Electrochemical Society
3 Conference Proceedings CHARACTERIZATION AND RELIABILITY OF ELECTROLYTIC CAPACITORS EXPOSED TO HALOGENATED SOLVENTS Opila, R.L., MaSaitis, R.L., Muller, A.J., Psota-Kelty, L.A., Daoud, S. Electrochemical Society	9 Conference Proceedings Monitoring of Mobile Sodium Ions in SiQ Using Corona Charging Stevie,F.A., Persson,E., DeBusk,D.K., Savchuk,A., Hoff,A.M., Edelman,P., Lagowski,J. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Qualification of a Submicron Dust Particle Exposure Chamber for Life Testing Integrated Circuits, Components and Electronic Assemblies Comizzoli, R.B., Frankenthal, R.P., Peins, G. A., Psota-kelty, L. A., Siconolf, D. J., Sinclair, J. D. Electrochemical Society	10 Conference Proceedings Applications of scanning laser source technique for detection of surface-breaking defects Kromine,A.K., Fomitchov,P.A., Krishnaswamy,S., Achenbach,J.D. SPIE - The International Society for Optical Engineering
5 Conference Proceedings Environmental/Reliability Evaluations at Telecommunications Equipment Installations in Eastern Asia Comizzoli, R.B., Jankoski, C.A., Peins, G.A., Psota-Kelty, L.A., Siconolfi, D.J., Sinclair, J.D., Chengen, W., Gao, M. Electrochemical Society	11 Conference Proceedings Characterization of Concentrated CMP Slurries by Acoustic Techniques Carasso, M.L., Valdes, J.L., Psota-Kelty, L.A., Anthony, L.J. Electrochemical Society
6 Conference Proceedings RELIABILITY OF ELECTRONICS IN HARSH ENVIRONMENTS; ELECTRICAL LEAKAGE AND CORROSION CAUSED BY HYGROSCOPIC POLLUTANT PARTICLES Comizzoli, R.B., Jankoski, C.A., Peins, G.A., Psota-Kelty, L.A., Siconolfi, D.J, Sinclair, J.D. Electrochemical Society	12 Conference Proceedings STM Investigations of Confined Transition Metal Chalcogenide Colloidal Particles Kivuitu, F., Kelty, S. P. MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12