Reliability Issues for Submicron Interconnects and Vias
- Author(s):
- Thompson, C.V.
- Publication title:
- Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 1994-1
- Pub. Year:
- 1994
- Page(from):
- 176
- Page(to):
- 180
- Pages:
- 5
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770378 [1566770378]
- Language:
- English
- Call no.:
- E23400/941393
- Type:
- Conference Proceedings
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