Ultra-Clean Technology Development of Stainless Steel Pipe for Gas Delivery System in Semiconductor Manufacturing

Ultra-Clean Technology Development of Stainless Steel Pipe for Gas Delivery System in Semiconductor Manufacturing

Author(s):

Kadonaga, T.

Publication title:

Proceedings of the Symposium on Quality Management in Industrial Electrochemistry

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

1993-19

Pub. Year:

1993

Page(from):

115

Page(to):

126

Pages:

12

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566770262 [1566770262]

Language:

English

Call no.:

E23400/932471

Type:

Conference Proceedings

Details

TDL ID:	ZA00014108
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Quality Management in Industrial Electrochemistry
Conf. info. (Number):	1st

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