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INTRODUCTION OF OXYGEN INTO CVD DIAMOND BY MAGNETO-ACTIVE PLASMA CVD SYSTEM AT LOW SUBSTRATE TEMPERATURE

Author(s):
Yara, T.
Yuasa, M.
Hatta, A.
Suzuki, J.-i.
Ito, T.
Hiraki, A.
1 more
Publication title:
Proceedings of the Third International Symposium on Diamond Materials
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1993-17
Pub. date:
1993
Page(from):
365
Page(to):
371
Pages:
7
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770606 [1566770602]
Language:
English
Call no.:
E23400/932032
Type:
Conference Proceedings

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