HOMOEPITAXIAL DIAMOND LAYERS GROWN WITH DIFFERENT GAS MIXTURES IN A RF PLASMA REACTOR

HOMOEPITAXIAL DIAMOND LAYERS GROWN WITH DIFFERENT GAS MIXTURES IN A RF PLASMA REACTOR

Author(s):

Posthill, J.B.

Publication title:

Proceedings of the Third International Symposium on Diamond Materials

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

1993-17

Pub. Year:

1993

Page(from):

303

Page(to):

309

Pages:

7

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566770606 [1566770602]

Language:

English

Call no.:

E23400/932032

Type:

Conference Proceedings

Details

TDL ID:	ZA00014106
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Diamond Materials ; Meeting of The Electrochemical Society
Conf. info. (Number):	3rd ; 183rd
Conf. info. (Venue):	Honolulu, Hawaii, USA
Conf. info. (Date):	1993.05.16-1993.05.21

Similar Items:

1 Conference Proceedings PROCESS OF EPITAXIAL JOINING TO FABRICATE LARGE-AREA DIAMOND SINGLE CRYSTAL Malta, D.P., Posthill, J.B., Hudson, G.C., Thomas, R.E., Humphreys, T.P., Rudder, R.A., Markunas, R.J. Electrochemical Society	7 Conference Proceedings Fabrication of a Free-Standing, Synthetic, Single Crystal Diamond Plate Using Ion Implantation and Plasma-Enhanced Chemical Vapor Deposition Posthill, J. B., Malta, D. P., Humphreys, T. P., Hudson, G. C., Thomas, R. E., Rudder, R. A., Markunas, R. J. MRS - Materials Research Society
2 Conference Proceedings GROWTH AND CHARACTERIZATION OF HETEROEPITAXIAL NICKEL FILMS ON DIAMOND SUBSTRATES Humphreys, T.P., Jeon, Hyeongtag, Nemanich, R.J., Posthill, J.B., Rudder, R.A., Malta, D.P., Hudson, G.C., Markunas, … Materials Research Society	8 Conference Proceedings MICROSTRUCTURAL AND OPTICAL CHARACTERIZATION OF GaN FILMS GROWN BY PECVD ON (0001) SAPPHIRE SUBSTRATES Humphreys, T.P., Sukow, C.A., Nemanich, R.J., Posthill, J.B., Rudder, R.A., Hattangady, S.V., Markunas, R.J. Materials Research Society
3 Conference Proceedings LOW TEMPERATURE DIAMOND GROWTH: DEVELOPMENT OF WATER-BASED TECHNIQUES FOR DIAMOND CVD Rudder, R.A., Thomas, R.E., Hudson, G.C., Posthill, J.B., Malta, D.P., Markunas, R.J. Electrochemical Society	9 Conference Proceedings Development of Epitaxial, Tiling, and Cutting Processes for a Diamond Single Crystal Water Technology Posthill, J. B., Malta, D. P., Humphreys, T. P., Hudson, G. C., Thomas, R. E., Rudder, R. A., Markunas, R. J. MRS - Materials Research Society
4 Conference Proceedings *CHEMICAL VAPOR DEPOSITION OF DIAMOND FILMS USING WATER: ALCOHOL:ORGANIC-ACID SOLUTIONS Ruder, R.A., Posthill, J.B., Hudson, G.C., Malta, D.P., Thomas, R.E., Markunas, R.J., Humphreys, T.P., Nemanich, R.J. Materials Research Society	10 Conference Proceedings DIAMOND SURFACE STUDIES OF GROWTH MECHANISMS FROM WATER-ALCOHOL DEPOSITION CHEMISTRIES Thomas, R.E., Posthill, J.B., Rudder, R.A., Markunas, R.J., Frenklach, M. Electrochemical Society
5 Conference Proceedings A CORRELATIVE INVESTIGATION OF DEFECTS IN NATURAL AND PECVD-GROWN DIAMOND Malta, D.P., Posthill, J.B., Fitzgerald, E.A., Rudder, R.A., Hudson, G.C. Electrochemical Society	11 Conference Proceedings Influence of Surface Terminating Species on Electron Emission From Diamond Surfaces Thomas, R. E., Humphreys, T. P., Pettenkofer, C., Malta, D. P., Posthill, J. B., Mantini, M. J., Rudder, R. A., Hudson, … MRS - Materials Research Society
6 Conference Proceedings GROWTH AND CHARACTERIZATION OF SiGe CONTACTS ON SEMICONDUCTING DIAMOND SUBSTRATES Humphreys, T.P., Baumann, P.K., Turner, K.F., Nemamich, R.J., Alley, R.G., Malta, D.P., Posthill, J.B. Electrochemical Society	12 Conference Proceedings MBE GROWTH AND CHARACTERIZATION OF SixGe1-x MULTILAYER STRUCTURES ON Si(100) FOR USE AS A SUBSTRATE FOR GaAs HETEROEPITAXY Posthill, J.B., Malta, D.P., Venkatasubramanian, R., Sharps, P.R., Timmons, M.L., Markunas, R.J., Humphreys, T.P., … Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12