CHARACTERIZATION OF SINGLE AND POLYCRYSTALLINE SILICON BY EXTENSIONS OF THE ELYMAT TECHNIQUE

CHARACTERIZATION OF SINGLE AND POLYCRYSTALLINE SILICON BY EXTENSIONS OF THE ELYMAT TECHNIQUE

Author(s):

Publication title:

Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

1993-15

Pub. Year:

1993

Page(from):

252

Page(to):

261

Pages:

10

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566770590 [1566770599]

Language:

English

Call no.:

E23400/932030

Type:

Conference Proceedings

Details

TDL ID:	ZA00014104
Series ID:	PA00000028
Conf. info. (Name):	European Solid State Device Research Conference - ESSDERC ; Symposium on Crystalline Defects and Contamination
Conf. info. (Number):	23rd ; 1993
Conf. info. (Venue):	Grenoble, France
Conf. info. (Date):	1993.09.17

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