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CRITICAL ASPECTS OF WAFER CLEANING AND GATE OXIDE INTEGRITY

Author(s):
Mertens, P.W.
Meuris, M.
Schmidt, H.F.
Verhaverbeke, S.
Heyns, M.M.
Carr, P.
Graeff, D.
Schnegg, A.
Kubota, M.
Dillenbeck, K.
de Blank, R.
6 more
Publication title:
Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1993-15
Pub. date:
1993
Page(from):
87
Page(to):
102
Pages:
16
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770590 [1566770599]
Language:
English
Call no.:
E23400/932030
Type:
Conference Proceedings

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