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STUDY OF THE STACKING FAULT NUCLEI GENERATION/ DISSOLUTION TEMPERATURES ON CZ SILICON WAFERS AND ITS DEPENDENCE ON THE CRYSTAL POSITION

Author(s):
Publication title:
Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1993-15
Pub. date:
1993
Page(from):
16
Page(to):
25
Pages:
10
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770590 [1566770599]
Language:
English
Call no.:
E23400/932030
Type:
Conference Proceedings

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