Plasma Etching for Ultra Large Scale Integrated Circuit Manufacturing
- Author(s):
- Gottscho, R.A.
- Publication title:
- Proceedings of the fourth International Symposium on Ultra Large Scale Integration Science and Technology : ULSI science and technology/1993
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 1993-13
- Pub. Year:
- 1993
- Page(from):
- 283
- Page(to):
- 295
- Pages:
- 13
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770637 [1566770637]
- Language:
- English
- Call no.:
- E23400/932028
- Type:
- Conference Proceedings
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