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The Influence of HF, 0H, and Dissolved 02 on Silicon Surface Chemical Cleaning

Author(s):
Higashi, G.S.
Chabal, Y.J.
Raghavachari, K.
Becker, R.S.
Green, M.P.
Hanson, K.
Boone, T.
Eisenberg, J.H.
Shive, S.F.
DiBello, G.N.
Fulford, K.L.
6 more
Publication title:
Proceedings of the fourth International Symposium on Ultra Large Scale Integration Science and Technology : ULSI science and technology/1993
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1993-13
Pub. Year:
1993
Page(from):
189
Page(to):
198
Pages:
10
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770637 [1566770637]
Language:
English
Call no.:
E23400/932028
Type:
Conference Proceedings

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