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Ultra Shallow Junctions: Formation, Characterization, and Modeling

Author(s):
Osburn, C.M.
Chevacharoenkul, S.
Wang, Q.F.
Tsai, J.Y.
Cowen, A.
Rose, J.
Zhang, X.
Kellam, M.
3 more
Publication title:
Proceedings of the fourth International Symposium on Ultra Large Scale Integration Science and Technology : ULSI science and technology/1993
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1993-13
Pub. date:
1993
Page(from):
146
Page(to):
157
Pages:
12
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770637 [1566770637]
Language:
English
Call no.:
E23400/932028
Type:
Conference Proceedings

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