Bipolar and BiCMOS Devices and Circuits for ULSI

Bipolar and BiCMOS Devices and Circuits for ULSI

Author(s):: Nakamura, T.
Publication title:: Proceedings of the fourth International Symposium on Ultra Large Scale Integration Science and Technology : ULSI science and technology/1993
Title of ser.:: Electrochemical Society Proceedings Series
Ser. no.:: 1993-13
Pub. Year:: 1993
Page(from):: 55
Page(to):: 71
Pages:: 17
Pub. info.:: Pennington, NJ: Electrochemical Society
ISSN:: 01616374
ISBN:: 9781566770637 [1566770637]
Language:: English
Call no.:: E23400/932028
Type:: Conference Proceedings

Details

TDL ID:	ZA00014102
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Ultra Large Scale Integration Science and Technology : ULSI science and technology
Conf. info. (Number):	4th
Conf. info. (Venue):	Honolulu, Hawaii, USA
Conf. info. (Date):	1993.05.17-1993.05.18

Similar Items:

1 Conference Proceedings Bipolar and BiCMOS on SOI Nakamura, T, Shiba, T, Ikeda, T Electrochemical Society	7 Conference Proceedings ULSI Device Characterization Using Nano-SRP* De Wolf,P., Trenkler,T., Clarysse,T., Vandervorst,W. SPIE-The International Society for Optical Engineering
2 Conference Proceedings IMPACT STUDY OF THE USE OF ULSI, VLSI AND MOS GRADE CHEMICALS IN THE RCA CLEANING PROCESS ON MOS AND BIPOLAR DEVICES Tardif, F., Joly, J.P., Lardin, T., Tonti, A., Patruno, P., Levy, D., Sievert, W. Electrochemical Society	8 Conference Proceedings ULSI Device Characterization Using Nano-SRP De Wolf, P., Trenkler, T., Clarysse, T., Vandervorst, W. Electrochemical Society
3 Conference Proceedings IMPACT STUDY OF THE USE OF ULSI, VLSI AND MOS GRADE CHEMICALS IN THE RCA CLEANING PROCESS ON MOS AND BIPOLAR DEVICES Tardif, F., Joly, J.P., Lardin, T., Tonti, A., Patruno, P., Levy, D., Sievert, W. Electrochemical Society	9 Conference Proceedings *APPLICATION OF RTP-CVD TECHNOLOGY TO ULSI DEVICE FABRICATION Jung, K. H., Hseih, T. Y., Kwong, D. L. Materials Research Society
4 Conference Proceedings MMICs Using SiGe BiCMOS for Ubiquitous Wireless Network T. Masuda, N. Shiramizu, T. Nakamura, K. Washio Electrochemical Society	10 Conference Proceedings Patterning ULSI Circuits Carruthers,J.R. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Impact of SiC Structural Defects on the Degradation Phenomenon of Bipolar SiC Devices Malhan, R.K., Nakamura, H., Onda, S., Nakamura, D., Hara, K. Trans Tech Publications	11 Conference Proceedings Patterning ULSI circuits Carruthers,J.R. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Advanced Bipolar Devices and Related Problems Kimura K., Takahashi T. Martinus Nijhoff Publishers	12 Conference Proceedings Patterning ULSI circuits Carruthers,J.R. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12