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The Effects of the Deposition Conditions on the Composition and Properties of PECVD Silicon Dioxide Films

Author(s):
Publication title:
Proceedings of the second International Symposium on Electrochemical Processing of Tailored Materials
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1993-12
Pub. Year:
1993
Page(from):
265
Page(to):
276
Pages:
12
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770279 [1566770270]
Language:
English
Call no.:
E23400/932027
Type:
Conference Proceedings

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