Deposition and Etching Processes in InGaAsP Materials

Deposition and Etching Processes in InGaAsP Materials

Author(s):: Lum, R.M.
Publication title:: Proceedings of the second International Symposium on Electrochemical Processing of Tailored Materials
Title of ser.:: Electrochemical Society Proceedings Series
Ser. no.:: 1993-12
Pub. Year:: 1993
Page(from):: 159
Page(to):: 169
Pages:: 11
Pub. info.:: Pennington, NJ: Electrochemical Society
ISSN:: 01616374
ISBN:: 9781566770279 [1566770270]
Language:: English
Call no.:: E23400/932027
Type:: Conference Proceedings

Details

TDL ID:	ZA00014101
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Electrochemical Processing of Tailored Materials
Conf. info. (Number):	2nd
Conf. info. (Venue):	Honolulu, Hawaii, USA
Conf. info. (Date):	1993.05.16-1993.05.21

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