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USING OZIDATION TO STUDY THE REACTION BETWEEN POINT DEFFECTS AND DISLOCATION LOOPS

Author(s):
Meng, H.L.
Chen, J.
Robinson, H.G.
Law, M.E.
Slinkman, J.A.
Jones, K.S.
1 more
Publication title:
Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1993-6
Pub. date:
1993
Page(from):
236
Page(to):
242
Pages:
7
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770644 [1566770645]
Language:
English
Call no.:
E23400/930578
Type:
Conference Proceedings

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