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Organometallic Chemical Vapor Deposition of (BaSr)TiO3 Ferroelectric Thin Films

Author(s):
Wessels, B.W.
Wills, L.A.
Lu, H.A.
Gilbert, S.R.
Neumayer, D.A.
Schulz, D.L.
Marks, T.J.
2 more
Publication title:
Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1993-2
Pub. Year:
1993
Page(from):
291
Page(to):
299
Pages:
9
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770743 [1566770742]
Language:
English
Call no.:
E23400/930161
Type:
Conference Proceedings

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