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In-situ B Doping of Sii-xGex Film Epitaxially Grown on Si Using Ultraclean LPCVD

Author(s):
Honma, F.
Murota, J.
Yoshida, T.
Goto, K.
Maeda, T.
Aizawa, K.
Sawada, Y.
2 more
Publication title:
Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1993-2
Pub. Year:
1993
Page(from):
171
Page(to):
177
Pages:
7
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770743 [1566770742]
Language:
English
Call no.:
E23400/930161
Type:
Conference Proceedings

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