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Characterization of a Single Wafer Multi-Chamber Clustered EPI System at Reduced Pressure

Author(s):
Borland, J.
Carlson, D.
Riggi, C.
Florendo, L.
Pohl, C.
Gong, B.
Hey, P.
2 more
Publication title:
Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1993-2
Pub. date:
1993
Page(from):
147
Page(to):
155
Pages:
9
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770743 [1566770742]
Language:
English
Call no.:
E23400/930161
Type:
Conference Proceedings

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