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Growth of Si/SipxGex/Si Heterostructure by Ultraclean Low Temperature LPCVD

Author(s):
Maeda, T.
Murota, J.
Sakamoto, K.
Aizawa, K.
Ushioda, S.
Ono, S.
1 more
Publication title:
Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
1993-2
Pub. Year:
1993
Page(from):
127
Page(to):
133
Pages:
7
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770743 [1566770742]
Language:
English
Call no.:
E23400/930161
Type:
Conference Proceedings

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