ELECTRICAL AND CHEMICAL DATA FOR QUALITY CONTROL STUDIES OF SILICON NITRIDE AND SILICON OXYNITRIDE FILMS UTILIZED IN Si AND GaAs INTEGRATED CIRUITS

ELECTRICAL AND CHEMICAL DATA FOR QUALITY CONTROL STUDIES OF SILICON NITRIDE AND SILICON OXYNITRIDE FILMS UTILIZED IN Si AND GaAs INTEGRATED CIRUITS

Author(s):

O'Clock, G.D., Jr.

Publication title:

Proceedings of the Second International Symposium on Corrosion and Reliability of Electronic Materials and Devices

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

1993-1

Pub. Year:

1993

Page(from):

269

Page(to):

276

Pages:

8

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566770514 [1566770513]

Language:

English

Call no.:

E23400/930160

Type:

Conference Proceedings

Details

TDL ID:	ZA00014090
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Corrosion and Reliability of Electronic Materials and Devices
Conf. info. (Number):	2nd
Conf. info. (Venue):	Toronto, Ontario, Canada
Conf. info. (Date):	1992.10.11-1992.10.16

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