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Further Optimization of Plasma Nitridation of Ultra-thin Oxides for 65 nm 236 Node MOSFETs

Author(s):
Kraus, P.A.
Chua, T.C.
Rothschild, A.
Cubaynes, F.N
Veloso, A.
Mertens, S.
Date, L.
Baue, T.M.
Ahmed, K.Z.
Campbell, J.
Noun, F.
Cruse, J.
Schreutelkamp, R.
Schaekers, M.
9 more
Publication title:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-01
Pub. Year:
2004
Page(from):
236
Page(to):
243
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774062 [1566774063]
Language:
English
Call no.:
E23400/200401
Type:
Conference Proceedings

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