Blank Cover Image

Laser Anneal Technology for Enhancement of Poly-Silicon Dopant Activation

Author(s):
Ma, Y.
Ahmed, K.Z.
Cunningham, K.L.
Olsen, C.S.
Leung, T.Y.B.
Mcintosh, R.C.
Mayur, A.J.
Liang, H.
Yam, M.
Castle, M.
Muthukrishnan, S.
Liu, P.M.
Foad, M.
Miner, G.E.
Higashi, G.S.
10 more
Publication title:
Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2004-01
Pub. Year:
2004
Page(from):
230
Page(to):
235
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774062 [1566774063]
Language:
English
Call no.:
E23400/200401
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings *SURFACE PHOTOCHEMICALLY ACTIVATED CHEMICAL VAPOR DEPOSITION OF PATTERNED ALUMINUM THIN FILMS

Higashi, G.S., Blonder, G.E., Fleming, C.G.

Materials Research Society
7 Conference Proceedings Systematic methodology for optimizing the trade-off of polysilicon depletion versus boron penetration in sub-0.18-ｦﾌm surface-channel PMOS devices

Scott,G.S., Saha,S.K., Olsen,C.S., Nouri,F., Lutze,J., Rubin,M.E., Manley,M.

SPIE - The International Society for Optical Engineering
2 Conference Proceedings Stress minimization of corner rounding process during STI

Olsen,C.S., Nouri,F., Rubin,M.E., Laparra,O., Scott,G.S.

SPIE - The International Society for Optical Engineering
8 Conference Proceedings 4 Chemical Risk Assessment in the Product Development Cycle

Connors, P.M., Dripps, G.S.

Electrochemical Society
3 Conference Proceedings Optimization of Fluorine Co-Implantation for PMOS Source and Drain Extension Formation for 65 nm Technology Node

Graoui, H., Hilkene, M., McComb, B., Castle, M., Felch, S., Cowern, N.E.B., Al-Bayati, A., Tjandra, A., Foad, M.A.

Materials Research Society
9 Conference Proceedings 4D reconstructions from low-count SPECT data using deformable models with smooth interior intensity variations

Cunningham,G.S., Lehovich,A.

SPIE - The International Society for Optical Engineering
4 Conference Proceedings Investigations on Humidity Sensing Properties of Thick Films of the TiO2:WO3 System

P.M. Faia, A.J. Ferreira, C.S. Furtado

Trans Tech Publications
10 Conference Proceedings Posterior sampling with improved efficiency

Hanson,K.M., Cunningham,G.S.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Optimization of Pre-Amorphization and Dopant Implant Conditions for Advanced Annealing

Felch, S.B., Graoui, H., Mayur, A.

Electrochemical Society
11 Conference Proceedings Exploring the reliability of Bayesian reconstructions

K.M. Hanson, G.S. Cunningham

Society of Photo-optical Instrumentation Engineers
6 Conference Proceedings 6 Cleaning Technology in Semiconductor Device Manufacturing: Approaches to Environmentally Responsible Processing

Rosamillia, J.M., Boone, T., Higashi, G.S.

Electrochemical Society
12 Conference Proceedings Bayesian estimation of regularization parameters for deformable surface models

Cunningham,G.S., Lehovich,A., Hanson,K.M.

SPIE - The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12