Blank Cover Image

ADHESION AND REMOVAL OF SILICA AND ALUMINA SLURRY PARTICLES DURING Cu CMP PROCESS

Author(s):
Publication title:
Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-26
Pub. date:
2003
Page(from):
312
Page(to):
320
Pages:
9
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774116 [156677411X]
Language:
English
Call no.:
E23400/200326
Type:
Conference Proceedings

Similar Items:

Hong, Y.K., Eom, D.H., Lee, S.H., Park, J.G., Busnaina, A.A.

Electrochemical Society

Y.-K. Hong, J.-H. Song, Y.-J. Kang, I.-K. Kim, J.-G. Park, H.-S. Song, K.-S. Kim, J.-J. Myung, H.-J. Lee, S.-Y. Song

Electrochemical Society

J.-H. Song, Y.-K. Hong, T.-G. Kim, Y.-J. Kang, I.-K. Kim, J.-H. Han, J.-G. Park, A. A. Busnaina

Electrochemical Society

Song, Jae-Hoon, Han, Ja-Hyung, Hong, Yi-Koan, Kang, Young-Jae, Park, Jin-Goo, Maeng, Ju-Ho, Won, Young-Man

Materials Research Society

Busnaina, A.A., Xiong, X., Park, J.G.

American Society of Mechanical Engineers

Lee, J.M., Cho, S.H., Kim, T.H., Park, J.-G., Busnaina, A.A.

SPIE - The International Society of Optical Engineering

T. Kim, S. Hu, A.A. Busnaina, J. Park

Electrochemical Society

Lee, S.-Y., Lee, S.-H., Eom, D.-H., Kim, K.-S., Song, H.-S., Park, J.-G.

Electrochemical Society

T. Kim, K.L. Wostyn, P. Mertens, A.A. Busnaina, J. Park

Electrochemical Society

Hong, Y.-K., Eom, D.-H., Park, J.-G.

Electrochemical Society

Hong, Yi-Koan, Han, Ja-Hyung, Song, Jae-Hoon, Park, Jin-Goo

Materials Research Society

Zhang, F., Wake, R.W., Cook, L., Busnaina, A.A.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12