Blank Cover Image

Examines integration of Hf-based gate dielectrics with polysilicon gate electrodes.

Author(s):
DeGendt  
Publication title:
Physicas and technology of high-k gate dielectrics : proceedings of the International Symposium on High Dielectric Constant Materials : Materials Science, Processing, and Reliability, and Manufacturing Issues
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-22
Pub. date:
2003
Page(from):
267
Page(to):
276
Pages:
10
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774055 [1566774055]
Language:
English
Call no.:
E23400/200322
Type:
Conference Proceedings

Similar Items:

Tsai, W., Ragnarrson, L.-A., Schram, T., DeGendt, S., Heyns, M.

Electrochemical Society

Kaushik, V., De Gendt, S., Caymax, M., Young, E., Rohr, E., Van Elshocht, S., Delabie, A., Claes, M., Shi, X., Chen, I., …

Electrochemical Society

M. Niwa, R. Mitsuhashi, S. Hayashi, K. Yamamoto, Y. Harada, M. Kubota, A. Rothchild, T. Hoffmann, S. Kubicek, S. …

Electrochemical Society

Srinivasan, P., Simoen, E., Pantisano, L., Claeys, C., Misra, D.

Electrochemical Society

V. S. Kaushik, K. Rohr, S. Hyun, S. De Gendt, S. Van Elshocht, A. Debbie, J. Everoert, A. Veboso, S. Brus, L. …

Electrochemical Society

Froschle, B., Bruemmer, H. P., Lang, W., Neumeier, K., Ramm, P.

MRS - Materials Research Society

Kaushik, V. S., DeGendt, S., Carter, R., Claes, M., Rohr, E., Pantisano, L., Kluth, J., Kerber, A., Cosnier, V., …

Materials Research Society

Iwamoto, T., Ogura, T., Terai, M., Morioka, A., Saitoh, M., Kimizuka, N., Yasuda, Y., Imai, K., Fujieda, S., Watanabe, …

Electrochemical Society

Tsai, W., Chen, I., Carter, R., Cartier, E., Kluth, J., Richard, O., Claes, M., Lin, Y.M., Nohira, H., Conard, T., …

Electrochemical Society

K. Chang-Liao, C. Cheng, T. Wang, Y. Wang

Electrochemical Society

Tsai, W., Chen, I., Carter, R., Cartier, E., Kluth, J., Richard, O., Claes, M., Lin, Y.M., Nohira, H., Conard, T., …

Electrochemical Society

Zaman, R.J., Damiano, J., Jr., Batra, S., Manning, M., Banerjee, S.K.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12