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Tribological and Removal Rate Characterization of Colloidal vs. Fumed Silica Slurries in ILD CMP

Author(s):
Sugiyama, M.
King, D.
Charns, L.
Degraffenreid, J.
Nguyen-Ngoc, H.
philipossian, A.
1 more
Publication title:
Chemical Mechanical Planarization : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2003-21
Pub. Year:
2003
Page(from):
257
Page(to):
265
Pages:
9
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566774048 [1566774047]
Language:
English
Call no.:
E23400/200321
Type:
Conference Proceedings

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