Ultra High Precision of the Tilt/Twist Misorientation Angles in Silicon/Silicon Direct Wafer Bonding
- Author(s):
Fournel, F. Monceau, H. Leroy, F. Eymery, J. Gentile, P. Rosseau, K. Rouviere, J.-L. - Publication title:
- Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2003-19
- Pub. Year:
- 2003
- Page(from):
- 376
- Page(to):
- 385
- Pages:
- 10
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566774024 [1566774020]
- Language:
- English
- Call no.:
- E23400/200319
- Type:
- Conference Proceedings
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